湿法刻蚀机/Wet Etcher-TFT-LCD/OLED湿制程设备-产品与解决方案-显示-苏州晶洲装备科技有限公司

首页 > 产品与解决方案 > 显示 > TFT-LCD/OLED湿制程设备

从G2.5到G8.6及以上尺寸ITO、IGZO、Ag、Mo、Al、Cu、Rework等各工艺类型湿制程刻蚀机设备的自主研发 湿法刻蚀机/Wet Etcher

工序数：单张基板需刻蚀3次以上，占面板制程总工序约5％
台套数：但AMOLED 30K 前段工厂需求≥6台/套

联系我们资料下载

湿法刻蚀机（Wet etcher).png

高精度搬送.png

精密控制.png

处理能力.png

防污染.png

解决方案.png

高精度稳定搬送

精密工艺控制

基板表面处理能力强

全面防污染设计

系统化解决方案

设备参数

适用工艺	ITO、IGZO、Ag、Mo、Al、Cu、Rework……
适用基板尺寸	所有尺寸
适用基板厚度	≥0.3mm
刻蚀类型	多角度喷淋摇摆/浸泡
设备类型	I型、U型、线型、定制
工艺能力	玻璃内均匀性、玻璃间均匀性、批次间均匀性; 无 Mura、无滚痕、无污染、无划痕关键线宽（CD）均匀性关键线宽（CD）损耗低运行成本

基本文件流程错误 SQL 调试

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